Physics of Radiofrequency Capacitive Discharge
V. P. Savinov
Physics of Radiofrequency Capacitive Discharge
V. P. Savinov
Paperback
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Engels
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Omschrijving
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.
V. P. Savinov